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High Vacuum Magnetron Sputter Source 3 inch

SpinTron 3: 3-inch diameter high vacuum magnetron sputtering gun.
 

Product Code: SpinTron 3

5 in stock




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Description
The SpinTron3 is a circular magnetron sputtering gun with a 3-inch diameter. It can accommodate a wide range of sputtering targets, metallic or insulating, magnetic or non-magnetic. The internal magnetic configuration utilizing a circular rare-earth NdFeB permanent magnet enables excellent film uniformity and target utilization. The SpinTron3 is easy to install, to operate, and to maintain. The quality construction provides long-term operation, and the shock-absorbing packaging design allows secure shipping and storage.
Features
  • Quality construction: The SpinTron series of sputtering guns was designed and manufactured with a focus on details. We use high quality materials of stainless steel and ceramics. The design and selection of components and materials are based on the principles of physics and engineering.
  • Enhancement from magnetic assembly: We have used electromagnetic finite element calculations in the design of the permanent magnetic assembly to achieve high field strength and uniform field profile. We use NdFeB rare-earth permanent magnets in every SpinTron product and offer a top-of-the-line magnetron sputtering tool. The magnet is coated with multiple layers of protective material against cooling-water induced corrosion to maximize durability.
  • Strong coupling with external power:The SpinTron is equipped with a standard electrical RF connector, which matches physically and electronically with a wide range of DC and RF sputtering power supplies. The low impedance sputtering heads are easily interfacible with an external power supply.
  • Easy installation and adjustment: The SpinTron can be installed very easily with a standard fitting without the use of special tools. Its position in the vacuum chamber can be adjusted conveniently.
  • Easy target change: Change of target is as easy as "123" by first placing the target on the anode, then putting on the target cover, and finally, adding on the anode shield. There is no need to adjust the gun to fit targets with different height.
  • Versatile sizes: The SpinTron Series consists of 1, 2, 3, and 4-inch diameter sputtering heads. Other diameters can be custom made with similar performance as the standard offerings.
  • Easy maintenance: The SpinTron is easy to maintain and designed to have a long life time.
  • Customer centered services: We guarantee our products against defective parts and poor workmanship and strive to minimize down-time for the products. We are so confident about the SpinTron that we will provide a loaner for a SpinTron under repair, so that the disruption to your business is minimized.
Applications

The SpinTron magnetron guns can be used to fabricate a wide range of films. Some of the applications are listed below,

  • Film coating
  • Semiconductor devices
  • Spintronic devices
  • Magnetic recording media
  • Superconducting films
  • Quantum computing devices
  • MEMS
  • Biosensors
  • Nanotechnology
  • Superlattices
  • Granular films
  • Shape memory alloys
  • Combinatorial thin film deposition
  • Thin film based lasers 
  • Technical Specification
    Sputtering Target
     
     
    Diameter
    3.0" (76.2mm)
     
    Thickness
    to 1/4" for non-magnetic target
     
     
    to 1/16" for magnetic target
     
    Utilization
    up to 30%
     
    Magnet
    NdFeB Rare Earth Magnet
     
     
     
    Power
     
     
    DC (Max.)
    1200 W
     
    RF (Max.)
      800 W
     
    Sputtering Current (Max.)
    3 Amp
     
    Sputtering Voltage
    100-1000 V
     
    Sputtering Pressure
    .5-100 mTorr
     
     
     
    Cooling Water
     
     
    Flow Rate
    1  GPM
     
    Water Inlet Temperature
    <20 C
     
    Water tubing
    0.25" O.D.
    Mounting
     
     
    Feedthrough
    1" O.D.tube
     
    Electrical Connector
    Standard HN type (DC and RF)
     
     
     
    Dimension and Weight
     
     
    Anode Shield Diameter
    4.75"
     
    Total Length
    15''
     
    Weight
    12 lbs

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