High vacuum chamber, approximately 18”(height)x 14”(depth) x13”(width), with front door that will seal against a Viton O-ring. Standard ports include pumping/gauge ports, and feedthrough ports for heater/temperature sensor and electrical current connector for internal electromagnet.
Features
6" View port.
Standard 19-inch wide electronics rack for housing all electronic components including power distribution, power supplies, etc.
Two 6" NdFeB magnets mounted on soft-iron flux guide designed for magnetic field enhancement using finite-element analysis.
Magnetic field up to 0.4 Tesla with 2% magnetic field uniformity over 2" sample cartridge.
Substrate sample heater box with the capacity to hold up to eight 2” wafers.
Enclosed heater box capable of reaching 500°C with 1.5% temperature uniformity.
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